Gas Chromatography Mass Spectroscopy (GC-MS) is a powerful analysis technique widely used in semiconductor manufacturing to ensure material quality, identify impurities, and provide possible sources for yield issues related to contamination.
In the semiconductor industry, even trace amounts of contaminants can significantly impact performance and reliability. By using GC-MS, manufacturers can detect and quantify contaminants at the parts-per-billion or parts-per-trillion level.
At Cerium Laboratories, we use multiple GC-MS tools, including Automated Thermal Desorption Gas Chromatography Mass Spectrometry (ATD-GC-MS), which separates mixtures of organic compounds within the sample and determines the identity and concentration of each volatile organic component (VOC).
This technique can be used on solid material, liquids such as process chemicals, IPA, and ultrapure water, or airborne molecular contaminates from the manufacturing environment. These may be present as an adsorbed film on silicon wafers, airborne vapors, dissolved components, or vapors that outgas from plastics, coatings, garments, o-rings, and similar materials.
Overall, GC-MS is an essential analysis technique for semiconductor manufacturing and yield management. As an ISO 17025 accredited laboratory, Cerium Laboratories assures clients that test methods have been validated and their data has passed quality checks.