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Cerium LIMS— FedRAMP & FIPS 140-2 alignment in progress

Cerium Laboratories, LLC

Capabilities

Analytical Techniques

An extensive array of material analysis techniques including electron imaging, surface science, mass spectroscopy, and chemical analysis.

21 techniques

SEM/EDS

Scanning Electron Microscopy / Energy Dispersive X-Ray Spectroscopy

A focused electron beam scanned across a sample surface generates images that provide topographical and structural information, with EDS adding elemental analysis.

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TEM – EDS/EELS

Transmission Electron Microscopy – EDS / EELS

Forward scattering of a high-energy electron beam transmitted through a sample forms images from regions as small as several nanometers, with EDS/EELS for composition.

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FIB

Focused Ion Beam

A highly focused ion beam locally sputters/mills materials to expose buried regions and prepare precise sub-micron samples for TEM or SEM.

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AFM

Atomic Force Microscopy

Scanning a nanometer-scale tip over a sample produces a three-dimensional view of the surface topology with ultra-high lateral and vertical resolution.

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XPS – ESCA

X-ray Photoelectron Spectroscopy / Electron Spectroscopy for Chemical Analysis

An extremely surface-sensitive chemical analysis technique that measures the elements and chemical states of the outermost 20-50 Å of a material.

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SIMS

Secondary Ion Mass Spectroscopy

A high-energy ion beam sputters solid samples and a mass spectrometer counts the expelled ions, yielding elemental concentration as a function of depth.

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HR-ICP-MS

High Resolution Inductively Coupled Plasma Mass Spectrometry

An elemental analysis technique that identifies and measures trace metals in liquid solutions down to sub-ppt concentrations.

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VPD – ICP-MS

Vapor Phase Decomposition Inductively Coupled Plasma Mass Spectroscopy

Trace elements on a silicon wafer surface are collected into a liquid sample via vapor phase decomposition, then analyzed by HR-ICP-MS.

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ICP-OES

Inductively Coupled Plasma Optical Emission Spectrometry

Measures major, minor and bulk trace elements in liquid suspensions and digested solids in the 1 ppb to 1000+ ppm range.

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NAA

Neutron Activation Analysis

Measures bulk elemental composition by irradiating samples with neutrons and analyzing the characteristic gamma rays emitted as activated isotopes decay.

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IC

Ion Chromatography

Separates, identifies and measures ionic species dissolved in water, with detection limits typically 5-10 ppb for common anions and cations.

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TOC

Total Organic Carbon

An automated analyzer measures the total amount of organic carbon in water solutions with sensitivity of approximately 0.1 ppm.

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ATD GC-MS

Automated Thermal Desorption Gas Chromatography Mass Spectrometry

Common analysis for organics in solvents such as IPA and MIBC, including purge and trap GC-MS.

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RBS

Rutherford Backscattering Analysis

A high-energy ion beam bombards the sample surface; elastic and inelastic collisions provide chemical and thickness information non-destructively and standard-less.

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ERDA

Elastic Recoil Detection Analysis

An ion beam analysis used to depth profile light elements, most commonly hydrogen or deuterium, non-destructively and standard-less.

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PIXE

Particle Induced X-Ray Emission

A high-energy ion beam bombards the sample surface; X-ray emissions provide chemical information about the elements present, non-destructively and standard-less.

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NRA

Nuclear Reaction Analysis

An ion beam analysis technique used for depth profiling of light elements. (Source page content pending.)

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FTIR

Fourier Transform Infra-Red Spectrometry

Characterizes the chemical bonding present in solids, liquids and gases; for many organic compounds the infrared spectrum is a virtual fingerprint.

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Raman

Raman Spectroscopy

An inelastic light scattering technique that measures the vibrational spectra of molecules and solids, providing detailed information about chemical bonds.

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XRD / XRR

X-Ray Diffraction and X-Ray Reflectivity

Used to examine crystallographic structures of powders or films; XRR measures thin-film thickness, interfacial roughness and density.

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TXRF

Total Reflection X-Ray Fluorescence Spectroscopy

A sensitive method for analysis of trace metals on a silicon wafer surface, analyzing only the near surface (about 400 Å) of the wafer.

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