Elastic Recoil Detection Analysis

Elastic Recoil Detection Analysis (ERDA) is another ion beam analysis that is used to depth profile light elements, most commonly H or D. The technique uses a high-energy (MeV) ion beam to bombard the sample surface. Elastic collisions provide chemical information, i.e. the atomic number (Z) of the sample material and thickness based on the scattering depth. ERDA measures thin-films deposited on substrates like silicon or bulk crystalline materials. These measurements are non-destructive, and standard-less.

Some specific applications of ERDA are: direct analysis of H in the near surface region; depth profiling for relatively high concentration samples; and thin CVD films deposited from organic precursors for H content.